The Ultimate in Speed and Accuracy for Coordinate Measurement Applications - Seconds. Not Hours

SQ3000 CMM for Semiconductor Applications

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SQ3000 CMM utilizes CyberCMM™, a comprehensive software suite of coordinate measurement tools that provides highly accurate, 100% metrology-grade measurement on all critical points much faster than a traditional CMM, including coplanarity, distance, height and datum X, Y to name a few. A fast and easy set-up can be performed in less than an hour for programming complex applications as compared to slow, engineering resource-intensive set-up that typically requires multiple adjustments with traditional coordinate measurement machines (CMM).

Fastest – Seconds, not Hours

Significantly speeds attaining coordinate measurements vs. traditional CMMs. Reduces engineering resource time.

Easy-to-use Interface

Simplifies process with award-winning, intuitive, touch screen experience. Quick programming for complex applications. Multi-process capable – AOI, SPI, AOM, CMM

Metrology-grade Accuracy

Achieve metrology-grade accuracy with MRS-enabled technology. Repeatable and reproducible measurements for metrology, semiconductor, microelectronics and SMT applications.

SQ3000 3D CMM offers unmatched accuracy with the advanced MRS technology by meticulously identifying and rejecting reflections caused by shiny components making MRS an ideal technology solution for a wide range of applications including those with very high quality requirements.

The Ultra High-Resolution MRS sensor enhances the SQ3000 CMM platform, delivering superior performance ideally suited for Socket Metrology and micro-electronics applications where an even greater degree of accuracy and inspection reliability is critical.

22+

Award-Winning MRS Technology

Ultimate

High Accuracy, Resolution and Speed

Intuitive

Easy-to-Use Software

Inspection Speed

Standard MRS Sensor: 40 cm²/sec (2D+3D)

High-Speed MRS Sensor: 50 cm²/sec (2D+3D)

High-Resolution MRS Sensor: 20 cm²/sec (2D+3D)

Ultra-High Resolution MRS Sensor: 15 cm²/sec (2D+3D)

Field of View (FOV)

Standard MRS Sensor: 36 x 30 mm

High-Speed MRS Sensor: 36 x 36 mm

High-Resolution MRS Sensor: 26 x 26 mm

Ultra-High Resolution MRS Sensor: 21 x 21 mm

Coordinate Measurement
Capability

Line / Distance / X,Y / Mid Line, Inter Point / Regression Shifted, Datum X,Y / LSF X,Y Offset,
X,Y Offset / Value / Location / List of X,Y Values, Height / Local Height / Regression

Radius, Coplanarity/ Distance to plane / 2nd Order fitting, Difference / Absolute / 2sqrt / VC, Max / Min / Ave / Sigma / Plus / Minus / Multiple

X Y Resolution

Standard MRS Sensor and High-Speed MRS Sensor: 10µm

High-Resolution MRS Sensor and Ultra-High Resolution MRS Sensor: 7µm

Z Resolution

0.5µm

Accuracy XY

Standard MRS Sensor and High-Speed MRS Sensor: 6µm

High-Resolution MRS Sensor and Ultra-High Resolution MRS Sensor: 5µm

Accuracy Z

2 μm

Minimum Feature Size

Standard MRS Sensor and High-Speed MRS Sensor: 100µm

High-Resolution MRS Sensor and Ultra-High Resolution MRS Sensor: 70µm

Maximum Feature Size

SQ3000: 510 x 510 mm (20 x 20 in.)

SQ3000-X: 710 x 610 mm (27.9 x 24 in.)

Minimum Feature Height

50 μm

Maximum Feature Height

Standard MRS Sensor and High-Speed MRS Sensor: 24mm

High-Resolution MRS Sensor and Ultra-High Resolution MRS Sensor: 8mm