APS3
WaferSense® Airborne Particle Sensor™
Improve equipment set-up and long-term yields by wirelessly monitoring airborne particles in real-time. Thinner. Lighter. Precision Accuracy.
Improve equipment set-up and long-term yields by wirelessly monitoring airborne particles in real-time. Thinner. Lighter. Precision Accuracy.
Speed equipment qualification with wireless measurements.
Shorten equipment maintenance cycles with wafer-like form factor.
Lower equipment expenses with objective and reproducible data.
Improve equipment set-up and long-term yields by wirelessly monitoring airborne particles in real-time. Thinner. Lighter. Precision Accuracy. Available in 150, 200 and 300mm sizes.
The APS technology enables equipment engineers to shorten equipment qualification, release to production and maintenance cycles, all while reducing expenses. Customers have experiences up to 88% time savings, up to 95% reduction in costs and up to 20X the throughput with half the manpower requirements by using the APS technology relative to legacy surface scan wafers.
88% reduction, half the manpower
95% reduction in costs
20X Increase
Wafer-shaped
Available in 150mm, 200mm, and 300mm wafer sizes,
Measures particles greater than .14 microns
Reports particles in 0.1μm and 0.5μm bin sizes and larger particles in 2, 5, 10 and 30 μm bin sizes.
Wireless
Transmits particle data to your laptop or PC in real-time.
Easy-to-use software
CyberSpectrum™ application software provides the user with real time visual feedback and can record and replay logged data for review and analysis.