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AGS

WaferSense® Auto Gapping System™ (AGS)

Improve Uniformity and Yield with WaferSense AGS for Accurate and Repeatable Setups

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Achieve the ideal set-up for your equipment by measuring gaps at three points.

Achieve exactly the gap you need, whether you need to set a gap that is perfectly parallel or slightly tilted to achieve the best uniformity. The three AGS sensor each report separate readings from chambers at process pressure in numerical and graphical form to let you achieve exactly the gap you need.

Improve tool-to-tool process uniformity with objective and repeatable gap adjustments.

Have peace of mind by taking the human variable out of adjusting your equipment with objective (numerical) measurements. Make the right adjustments time after time with numerical and graphical displays. Improve tool-to tool process uniformity by enabling anyone to set the same gap across the tools.

Reduce equipment calibration time through live feedback.

See the effects of adjustments in real-time with CyberSpectrum™ software’s graphical user interface, provided with AGS. Numerical and graphical measurements can be taken from inside an evacuated process chamber with a clear indication when equipment settings are within tolerance.

Speed setups, maintenance and troubleshooting with automatic handling.

Available in 200mm and 300mm wafer sizes.
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Speeds non-contact gap measurements and parallelism adjustments under vacuum for semiconductor processes such as thin-film deposition, sputtering and etch. Improves uniformity, tool availability and repeatability.

Wafer-shaped

Available in 200mm and 300mm wafer sizes.

Highly accurate

Measures gaps with +-25 micron accuracy within 4 hours of field offset calibration. Gap resolution +-5 microns.

Wireless

No wires that can break after repeated use and AGS will never be misaligned by strained wires. Transmit data in real-time.

Easy-to-use software

CyberSpectrum software displays numerical and graphical information. Each graphic is color coded to make it easier to see when the gap is above, below or within the user-defined target gap range. CyberSpectrum lets you log time-stamped measurements to a CVS file for documentation and/or analysis.