CyberOptics Showcases Wireless Measurement Sensors at SEMICON Korea

The World’s Most Efficient and Effective Wireless Measurement Sensors Improve Yields and Tool-uptime

Minneapolis, Minnesota — January, 2022 — CyberOptics® Corporation (NASDAQ: CYBE), a leading global developer and manufacturer of high-precision 3D sensing technology solutions will feature the In-Line Particle Sensor™ (IPS™) and Auto Resistance Sensor™ (ARS™) for semiconductor tool set-up and equipment diagnostics at SEMICON Korea at the COEX in Seoul, from February 9-11th in booth C236. CyberOptics is a gold sponsor of the conference.

WaferSense® Auto Resistance Sensor (ARS) enables real-time resistance measurements to detect residue affecting plating pins in semiconductor Electrochemical Deposition (ECD) applications. Process and equipment engineers in semiconductor fabs can predict when a tool needs maintenance with quantitative analysis of measured mean resistance over time, shorten equipment maintenance cycles, and improve cell-to-cell uniformity with the wafer-like, 4-wire resistance sensor and CyberSpectrum™’s objective and repeatable data.

CyberOptics’ In-Line Particle Sensor ( IPS) is an extension of the industry-leading WaferSense® Airborne Particle Sensor™ ( APS™) technology that is documented by fabs as the Best-Known Method (BKM). IPS quickly identifies, monitors and enables troubleshooting of particles down to 0.1µm in gas and vacuum lines 24/7. It is ideal for use in semiconductor process equipment and is particularly relevant for EUVL tools where the ability to monitor particles in-line can significantly improve EUVL tool yield and productivity. The IPS is always on and collecting particle data, which is especially critical during chamber purging. The effects of cleaning, adjustments and repairs can be seen in real-time.