In-line Particle Sensor™ (IPS™)
24/7 detection of small particles in gas and vacuum lines.
Speed equipment qualification with real-time 24/7 monitoring.
Shorten equipment maintenance cycles with inline particle sensing.
Lower equipment expenses with objective and reproducible data.
Based on our WaferSense® Airborne Particle Sensor™ technology, IPS utilizes a high power blue laser to quickly monitor, identify and enable troubleshooting of particles down to 0.1μm within gas and vacuum lines in semiconductor process equipment.
ISO-63 flange (other fittings available)
Measures particles greater than 0.1μm
Less than 5 false counts per hour
Less than 10-6 atm-l/sec leak rate
Certified to Laser Class 1