Software for WaferSense® • ReticleSense® • In-Line Particle Sensor™
CyberSpectrum™ Software
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CyberSpectrum is a powerful yet extremely simple software with an intuitive interface providing numerical and visual feedback for real-time measurement and analysis for multiple applications.
CyberSpectrum is compatible with the new In-Line Particle Sensor™ and all WaferSense® and ReticleSense®devices for chamber gapping, leveling, wafer handoff teaching, vibration, airborne particle, relative humidity and resistance measurement.