WaferSense® Auto Resistance Sensor™ (ARS)
Real time resistance measurement of plating cell contacts.
Shorten equipment maintenance cycles with wafer-like 4-wire resistance sensor.
Predict when a tool needs maintenance with quantitative analysis of measured mean resistance over time.
Improve cell-to-cell process uniformity with objective and repeatable resistance measurement.
Quickly monitors and identifies resistance
measurements with 50 separate measurement pads around the perimeter, utilizing Kelvin
Sensing (4-wire resistance) method for accurate measurement of low value resistance.
Available in 300mm
1mΩ ±1% of range with normalized readings
Resolution of 100μΩ
Edge contacts are mechanically robust with noble metal plating
50 Measurement Pads
Chemically compatible with SABRE chemistry and cleaning procedures
Lightweight and Thin
270 grams and 5.5mm thick