ATSR

ReticleSense® Auto Teaching System™ (ATSR)

Improve equipment set-up and long term yields by wirelessly capturing three dimensional off-set data (x, y and z) in real-time to quickly teach reticle transfer positions for proper alignment and set-up of semiconductor tools.

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Improve yields and lower particulate contamination with accurate reticle handoff calibration.

Capture offset data for accurate calibration of transfer positions as the reticle-like ATSR moves through your semiconductor equipment. Improve the yield of your manufacturing process with properly calibrated equipment.

Achieve repeatable and reproducible semiconductor equipment setups.

Eliminate technician-to-technician variation with the ATSR calibration that enables repeatable and reproducible setup and maintenance checks.

Reduce equipment downtime from hours to minutes.

Save time troubleshooting as the wireless and vacuum compatible ATSR allows equipment to remain sealed during inspection. Increase equipment availability while reducing manpower and consumable expense.

Speed troubleshooting and lower consumable expense with visual inspection.

Text for main 4 drop-down sections = (if 4 sections are possible) Improve yields and lower particulate contamination with accurate reticle handoff calibration. Capture offset data for accurate calibration of transfer positions as the reticle-like ATSR moves through your semiconductor equipment. Improve the yield of your manufacturing process with properly calibrated equipment. Achieve repeatable and reproducible semiconductor equipment setups. Eliminate technician-to-technician variation with the ATSR calibration that enables repeatable and reproducible setup and maintenance checks. Reduce equipment downtime from hours to minutes. Save time troubleshooting as the wireless and vacuum compatible ATSR allows equipment to remain sealed during inspection. Increase equipment availability while reducing manpower and consumable expense. Speed troubleshooting and lower consumable expense with visual inspection. Receive real-time images as robots move ATSR through the tool. New CyberSpectrum™ software graphical user interface provides x, y and z offsets that eliminate guesswork. Search for lost wafers and pedestal debris without opening the tool.
Data Sheets