APS Technology
The APS3 technology, an extension of the proven APS, incorporates large and small particle measurement capability in the same device, and is now thinner and lighter.
The APS3 technology enables equipment engineers to shorten equipment qualification, release to production and maintenance cycles, all while reducing expenses. Customers have experiences up to 88% time savings, up to 95% reduction in costs and up to 20X the throughput with half the manpower requirements by using the APS relative to legacy surface scan wafers.