ReticleSense® Auto Multi Sensor™ (AMSR)

Speed vibration, leveling and humidity measurements with all-in-one measurement device. Improve yields.

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Speed equipment qualification with wireless measurements.

Collect and display acceleration, vibration, leveling and humidity data. Monitor humidity in reticle environments. Use the Auto Multi Sensor with CyberSpectrum™ software for real-time equipment diagnostics. See the effects of adjustments in real-time, speeding equipment alignment and set-up.

Shorten equipment maintenance cycles with reticle-like form factor.

6” reticle sensor travels anywhere a reticle goes. Keep the process areas unexposed to the fab environment with vacuum compatible AMSR.

Lower equipment maintenance expenses and enhance process uniformity with objective and reproducible data.

Take the human element out of adjusting your equipment with objective measurements for multiple applications in one. Make the right adjustments time after time and receive early warning for impending equipment failures and optimize your preventative maintenance plans.

Monitoring Humidity to Reduce Reticle Haze Effects

Immersion technology scanners are adversely affected by a phenomenon
called “Haze” when proper measures are NOT taken to measure and control

AMSR can measure humidity in all locations of the reticle environment. In emersion scanner environments monitoring humidity is critical in reducing Reticle Haze

Vibration Applications

Robot Diagnosis: Tel Track, PVD, Asher

Particle issues can happen on a robot when used for 4 years. An overhaul of the robot resolves the particle issue. 55Hz frequency is the subject to be preventative maintenance.

Wireless, reticle-shaped and battery-powered

Available in 6” reticle shaped form factor.

Reports inclination in three dimensions

x, y and vertical

Reports Accelerations in three Dimensions

x, y and z


Transmits data wirelessly to your laptop or PC in real-time.