ReticleSense® Airborne Particle Sensor™ (APSR/APSRQ)

Improve equipment set-up and long term yields by wirelessly monitoring airborne particles in real-time.


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Speed equipment qualification with wireless measurements.

Collect and display particle data wirelessly using the APSR/RQ and CyberSpectrum™ software for real-time equipment diagnostics. Compare past to present as well as one tool to another with recorded particle data. Save time by swiftly locating contamination sources with the APSR/RQ data and see the effect of cleanings, adjustments and repairs in real time.

Shorten equipment maintenance cycles with reticle-like form factor.

Detect particles in real-time without opening the tool so you don’t need to expose process areas to the environment. APSR/RQ goes where reticles go to find the place where particles contaminate reticles. Once the location of particles is identified, tools may be selectively cleaned. Open only the dirty portion, keep the clean areas clean.

Lower equipment expenses with objective and reproducible data.

Raise your first-pass monitor reticle success, reduce your qualification expense and increase availability with APSR/RQ. Receive early warning for impending equipment failures and optimize your preventative maintenance plans. Establish a baseline from known clean tool, then cycle APSR/RQ through a candidate tool before committing monitor reticles.

Did You Know?

APS Technology

The APS technology enables equipment engineers to shorten equipment qualification, release to production and maintenance cycles, all while reducing expenses. Customers have experiences up to 88% time savings, up to 95% reduction in costs and up to 20X the throughput with half the manpower requirements by using the APS technology relative to legacy surface scan wafers.


Also available in 150mm, 200mm, and 300mm wafer sizes.

*Sizes vary by model

Measures particles greater than .14 microns

Reports particles in 0.1μm and 0.5μm bin sizes and larger particles in 2, 5, 10 and 30 μm bin sizes.


Transmits data to your laptop of PC in real-time.

Easy-to-use software

CyberSpectrum™ application software provides the user with real time visual feedback and can record and replay logged data for review and analysis.