- Speed equipment qualification with wireless measurements.
- Shorten equipment maintenance cycles with thin and lightweight wafer-like form factor.
- Lower equipment maintenance expenses and enhance process uniformity with objectiveand reproducible data.
When you need the most efficient and effective measurement devices for semiconductor tool set-up and maintenance processes, count on CyberOptics, the global market leader in wireless semiconductor measurement devices for chamber gapping, leveling, wafer-handoff teaching, vibration and airborne-particle measurement and relative humidity.
Semiconductor fabs and OEMs value the accuracy, precision and versatility of the WaferSense and ReticleSense measurement portfolio to enable improvements in fab yields and equipment uptime.