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Measure. Analyze. Improve.

CyberOptics is a leading global developer and manufacturer of high precision sensing technology solutions. CyberOptics’ 2D and 3D sensors are used in SMT, semiconductor and metrology markets to significantly improve yields and productivity.

High Precision Accuracy with Proprietary Multi-Reflection Suppression (MRS) Sensor Technology

  • Proprietary MRS sensor technology, deemed best-in-class, enables metrology-grade accuracy by inhibiting optical measurement distortions and reflections. At the heart of the world’s cell phone manufacturing inspection systems and used in various applications where highly accurate inspection is critical.

New NanoResolution Multi-Reflection Suppression (MRS) Sensor Technology

For wafer-level and advanced packaging inspection and measurement, CyberOptics new proprietary NanoResolution Multi-Reflection Suppression (MRS) sensor technology meticulously identifies and rejects multiple reflections caused by shiny components and mirror-like surfaces. Effective suppression of multiple reflections is critical for highly accurate measurements.

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Multi-Reflection Suppression (MRS) Sensor Technology integrated into Systems in Key Segments

Surface Mount Technology (SMT) Inspection & Measurement

MRS Sensor for SQ3000 3D AOI, SPI and CMM

CyberOptics’ breakthrough 3D sensing technology comprising four multi-view 3D sensors and a parallel projector delivering metrology grade accuracy at production speed. CyberOptics’ unique sensor architecture simultaneously captures and transmits multiple images in parallel while proprietary 3D fusing algorithms merge the images together. The result is ultra-high quality 3D images, accurate to sub 10 µm at production speed. Unmatched accuracy is achieved with the revolutionary MRS sensor technology by meticulously identifying and rejecting reflections caused by shiny components and reflective solder joints. Effective suppression of multiple reflections is critical for accurate measurement making MRS an ideal technology solution for a wide range of applications including those with very high quality requirements.

Ultra-High Resolution MRS Sensor for SQ3000 3D AOI, SPI and CMM

CyberOptics has advanced the proprietary Multi-Reflection Suppression (MRS) sensor to an even finer resolution with an accuracy of 7µm. The Ultra-High Resolution MRS sensor enhances the SQ3000 3D AOI platform, delivering superior inspection performance, ideally suited for the 0201 metric process and micro-electronic applications where an even greater degree of accuracy and inspection reliability is critical

MRS Sensor for SE3000 3D SPI

The new SE3000 3D SPI system is the world’s first SPI system to incorporate the industry-leading Multiple-Reflection Suppression (MRS) technology with a finer resolution for the best accuracy, repeatability and reproducibility – Even on the smallest paste deposits. Combined with the award-winning, easy-to-use SPI software, solder paste inspection has reached a new level of precision for the most stringent requirements.

Semiconductor Inspection

Ultra-High Resolution MRS Sensor for Semiconductor Applications

MRS Technology is an ideal solution for a wide range of applications including socket metrology, advanced packaging, solder ball & bump, copper pillar, and micro-electronic applications.

NanoResolution MRS Sensor for Wafer-Level and Advanced Packaging Applications

CyberOptics 3- micron NanoResolution MRS sensor enables metrology grade accuracy with superior 100% 2D and 3D inspection performance for features as small as 25-micron. 100% 2D and 3D inspection can be completed simultaneously at high speed, versus an alternate, slow method that requires two separate scans for 2D and 3D, and only a sampling of a few dies of the 25 wafers. It is two to three times faster than alternate solutions in the marketplace.

With data processing speeds in excess of 75 million 3D points per second, the NanoResolution MRS sensor delivers throughput greater than 25 wafers (300mm) per hour. This best-in-class MRS sensor technology is ideally suited for the inspection of CPU sockets, IC package, solder balls and bumps, copper pillars, and other advanced packaging and mid-end semiconductor applications where high precision and high speed are needed.

MRS Sensor for Back-End Semi

CyberOptics is an OEM supplier of proprietary MRS sensors to to KLA-Tencor (NASDAQ: KLAC) for KLATencor’s® BEOL package inspection systems.

3D Scanning Inspection and Metrology

MRS Sensor for Coordinate Measurement SQ3000 CMM

SQ3000 3D CMM offers unmatched accuracy with the advanced MRS technology by meticulously identifying and rejecting reflections caused by shiny components making MRS an ideal technology solution for a wide range of applications including those with very high quality requirements.

The Ultra-High Resolution MRS sensor enhances the SQ3000 CMM platform, delivering superior performance ideally suited for Socket Metrology and micro-electronics applications where an even greater degree of accuracy and inspection reliability is critical.

MRS Sensor for CyberGage®360
CyberGage360’s patented algorithms combine tremendous amounts of data into a single coordinate system using high-precision encoder position feedback for mechanical metrology-grade part measurement. No best fit piecing together of scan regions is used as is common in competitive projection scanning systems. The resulting part measurement provides NIST traceable system accuracy to 7 µm + L/10000, and repeatability to 5 µm. MRS suppresses the reflections caused by reflective surfaces better than any other projection scanning technology using the patented algorithms and optics born of MRS technology, resulting in a highly precise scan.

The MRS sensor incorporated into the CyberGage360 system utilizes two dual camera optical blue light scanning sensors mounted above and below the subject part sitting on an optically flat, clear glass plate calibrated for scanning. The glass plate allows simultaneous data capture from both sensors and eliminates the need to flip-over the part necessary for all other scanning and other conventional measuring systems. CyberGage360 can be used on the factory floor, in the inspection lab, or for incoming parts inspection.