Downloads and Manuals

For all of your product information needs for WaferSense® and ReticleSense® wireless measurement devices and wafer mapping sensors, including downloadable product instructions, technical notes and FAQs.

  • CyberOptics takes pride in providing responsive and expert technical support. Experienced and knowledgeable technical support/application engineers are just a click or phone call away.
  • CSsupport@cyberoptics.com
  • Phone: +1 (800) 366-9131 or +1 (763) 542-5000.
  • WaferSense® & ReticleSense® Wireless Measurement Devices
  • Wafer Mapping Sensors & Frame Grabbers
  • 1. Auto Gapping System | AGS
  • 2. Auto Leveling System | ALS, ALS2, & ALS2V
  • 3. Auto Multi Sensors | AMS, AMSR, AHS
  • 4. Airborne Particle Sensors | APS2, APS3, APSR & APSRQ
  • 5. Auto Teaching System | ATS
  • 6. Auto Vibration System | AVS
  • 7. Auto Vibration and Leveling Sensor | AVLS3
6. Auto Vibration System | AVS
7. Auto Vibration and Leveling Sensor | AVLS3

Manuals & Guides

  • 1. EX-43Q, EX-73Q, EX-83Q, EX-93Q, EX-43QS & EX-73QS