Yield-Improving Wireless Measurement Devices to be Demonstrated at SPIE

CyberOptics® will demonstrate its ReticleSense® Auto Multi Sensors – the world’s most efficient and effective wireless measurement devices for semiconductor fabs and equipment OEMs at SPIE Advanced Lithography at the San Jose Convention Center, February 27-28th at booth #314.

ReticleSense Auto Multi Sensors (AMSR) measure leveling, vibration, and relative humidity (RH) in an all-in-one wireless real-time device. The AMSR speeds equipment qualification, shorten equipment maintenance cycles and lower equipment maintenance expenses. Multiple measurements can be captured and monitored in all locations of the reticle environment, saving equipment engineers or process engineers’ time and expense.

CyberOptics will also demonstrate the ReticleSense Airborne Particle Sensor (APSRQ) that speeds equipment set-up and long-term yields in semiconductor fabs by wirelessly monitoring airborne particles in real-time. Engineers can save time by swiftly locating contamination sources and see the effect of cleanings, adjustments and repairs. In addition to small particles, the large particle detecting and measurement functionality covers a range of sizes with four bins for particles larger than 2, 5, 10 and 30 microns.