Video Spotlight: In-Line Particle Sensor™

Dr. Subodh Kulkarni, President and CEO, CyberOptics, discusses how the new In-Line Particle Sensor (IPS) can quickly monitor, identify and enable troubleshooting of particles down to 0.1μm within gas and vacuum lines in semiconductor process equipment, and the importance of particle sensing in the extreme ultra-violet lithography (EUV) process.

*Choose ‘Semiconductor Sensors’ from the drop down menu on our Contact page.