AMS
WaferSense® Auto Multi Sensor™
Speed vibration, leveling and humidity measurements with all-in-one measurement device. Improve yields.
Speed vibration, leveling and humidity measurements with all-in-one measurement device. Improve yields.
Speed equipment qualification with wireless measurements.
Shorten equipment maintenance cycles with thin and lightweight wafer-like form factor.
Lower equipment maintenance expenses and enhance process uniformity with objective and reproducible data.
Speed vibration, leveling and humidity measurements with all-in-one measurement device. Improve yields.
Semiconductor fabs and OEMs worldwide value the accuracy, precision and versatility of the WaferSense AMS – The most efficient and effective wireless measurement device for leveling, vibration and humidity.
Wireless, wafer-shaped and battery-powered
Available in 150mm, 200mm, 300mm.
Thin, 4.5mm thick
Reports Inclination in three dimensions
x, y and vertical
Reports Accelerations in three dimensions
x, y and z
Humidity Accuracy
+/- 2% RH