Fast and highly accurate with repeatable and reproducible measurements for metrology applications in the manufacturing of a wide variety of products such as PCBs, semiconductors and consumer electronics.
SQ3000™ CMM utilizes CyberCMM™, a comprehensive software suite of coordinate measurement tools that provides highly accurate, 100% metrology-grade measurement on all critical points much faster than a traditional CMM, including coplanarity, distance, height and datum X, Y to name a few. A fast and easy set-up can be performed in less than an hour for programming complex applications as compared to slow, engineering resource-intensive set-up that typically requires multiple adjustments with traditional coordinate measurement machines (CMM).
Fastest – Seconds, not Hours 
Easy-to-use Interface
Metrology-grade Accuracy
SQ3000 3D CMM offers unmatched accuracy with the advanced MRS® technology by meticulously identifying and rejecting reflections caused by shiny components making MRS an ideal technology solution for a wide range of applications including those with very high quality requirements.
The Ultra High-Resolution MRS sensor enhances the SQ3000 CMM platform, delivering superior performance ideally suited for Socket Metrology and micro-electronics applications where an even greater degree of accuracy and inspection reliability is critical.
36+
Award-Winning MRS Technology
Ultimate
High Accuracy, Resolution and Speed
Intuitive
Easy-to-Use Software
Inspection Speed
Standard MRS Sensor: 40 cm²/sec (2D+3D)
High-Speed MRS Sensor: 50 cm²/sec (2D+3D)
High-Resolution MRS Sensor: 20 cm²/sec (2D+3D)
Ultra-High Resolution MRS Sensor: 15 cm²/sec (2D+3D)
Field of View (FOV)
Standard MRS Sensor: 36 x 30 mm
High-Speed MRS Sensor: 36 x 36 mm
High-Resolution MRS Sensor: 26 x 26 mm
Ultra-High Resolution MRS Sensor: 21 x 21 mm
Coordinate Measurement
Capability
Line / Distance / X,Y / Mid Line, Inter Point / Regression Shifted, Datum X,Y / LSF X,Y Offset,
X,Y Offset / Value / Location / List of X,Y Values, Height / Local Height / Regression
Radius, Coplanarity/ Distance to plane / 2nd Order fitting, Difference / Absolute / 2sqrt / VC, Max / Min / Ave / Sigma / Plus / Minus / Multiple
X Y Resolution
Standard MRS Sensor and High-Speed MRS Sensor: 10µm
High-Resolution MRS Sensor and Ultra-High Resolution MRS Sensor: 7µm
Z Resolution
0.5µm
Accuracy XY
Standard MRS Sensor and High-Speed MRS Sensor: 6µm
High-Resolution MRS Sensor and Ultra-High Resolution MRS Sensor: 5µm
Accuracy Z
2 μm
Minimum Feature Size
Standard MRS Sensor and High-Speed MRS Sensor: 100µm
High-Resolution MRS Sensor and Ultra-High Resolution MRS Sensor: 70µm
Maximum Feature Size
SQ3000: 510 x 510 mm (20 x 20 in.)
SQ3000-X: 710 x 610 mm (27.9 x 24 in.)
Minimum Feature Height
50 μm
Maximum Feature Height
Standard MRS Sensor and High-Speed MRS Sensor: 24mm
High-Resolution MRS Sensor and Ultra-High Resolution MRS Sensor: 8mm
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