ReticleSense® Auto Multi Sensor™ (AMSR)
Speed vibration, leveling and humidity measurements with all-in-one measurement device. Improve yields.
Speed equipment qualification with wireless measurements.
Shorten equipment maintenance cycles with reticle-like form factor.
Lower equipment maintenance expenses and enhance process uniformity with objective and reproducible data.
Immersion technology scanners are adversely affected by a phenomenon
called “Haze” when proper measures are NOT taken to measure and control
AMSR can measure humidity in all locations of the reticle environment. In emersion scanner environments monitoring humidity is critical in reducing Reticle Haze
Robot Diagnosis: Tel Track, PVD, Asher
Particle issues can happen on a robot when used for 4 years. An overhaul of the robot resolves the particle issue. 55Hz frequency is the subject to be preventative maintenance.
Wireless, reticle-shaped and battery-powered
Available in 6” reticle shaped form factor.
Reports inclination in three dimensions
x, y and vertical
Reports Accelerations in three Dimensions
x, y and z
Transmits data wirelessly to your laptop or PC in real-time.