APSR / APSRQ
ReticleSense® Airborne Particle Sensor™ (APSR/APSRQ)
Improve equipment set-up and long term yields by wirelessly monitoring airborne particles in real-time.
Speed equipment qualification with wireless measurements.
Shorten equipment maintenance cycles with reticle-like form factor.
Lower equipment expenses with objective and reproducible data.
The APS technology enables equipment engineers to shorten equipment qualification, release to production and maintenance cycles, all while reducing expenses. Customers have experiences up to 88% time savings, up to 95% reduction in costs and up to 20X the throughput with half the manpower requirements by using the APS technology relative to legacy surface scan wafers.
Also available in 150mm, 200mm, and 300mm wafer sizes.
*Sizes vary by model
Measures particles greater than .14 microns
Reports particles in 0.1μm and 0.5μm bin sizes and larger particles in 2, 5, 10 and 30 μm bin sizes.
Transmits data to your laptop of PC in real-time.
ParticleSpectrum application software provides the user with real time visual feedback and can record and replay logged data for review and analysis.