EX-Q Wafer Mapping Sensor

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Our EX-Q wafer mapping sensor offers quick and reliable detection of semiconductor wafers and slotting errors in cassettes or FOUPs. This off-the-shelf sensor has ample detection headroom (sensitivity) allowing it to easily detect thin and dark-coated wafers of any size. It also has no moving parts that could result in particulate contamination.


  • EX-QS is available in two standoff distances: 1.5″ and 2.2″. EX-Q is available in 1.5” and 2.2”
  • Detects bright, dark and coated wafers in various size and edge geometries at factory gain setting.
  • Insensitive to interference from the mapping environment including stray reflections.
  • Easy-to-use, “off-the-shelf” direct interface requires no amplification or signal conditioning and reduces tool total cost of ownership.
  • Non-intrusive wafer mapping solution protects valuable wafers from inadvertent crashes.
  • No moving parts that can result in particulate contamination.
  • Detects cross-slotted and ultra-thin wafers.
  • Note: Connector is an option and must be specified when ordered.
  • Wafer Mapping Sensors Documentation
  • 1. EX-43Q, EX-73Q, EX-83Q, EX-93Q, EX-43QS & EX-73QS