Downloads and Manuals

For all of your product information needs for WaferSense® and ReticleSense® wireless measurement devices and the In-Line Particle Sensor™, including downloadable software, manuals and guides.

Looking for Wafer Mapping Sensor information? These documents have been moved to the Wafer Mapping Sensor Product pages.

  • CyberOptics takes pride in providing responsive and expert technical support. Experienced and knowledgeable technical support/application engineers are just a click or phone call away.
  • CSsupport@cyberoptics.com
  • Phone: +1 (800) 366-9131 or +1 (763) 542-5000.
  • WaferSense® & ReticleSense® (CyberSpectrum™)
  • WaferSense® & ReticleSense® (Legacy)
  • 1. Multi-Sensors | AMS, AMSR, AVLS3
  • 2. Particle Sensors | APS, APS2, APS3, APSR, APSRQ, IPS
  • 3. Auto Gapping System™ | AGS
  • 4. Auto Leveling System™ | ALS, ALS2, & ALS2V
  • 5. Auto Teaching System™ | ATS
  • 6. Auto Vibration System™ | AVS
  • 7. Auto Humidity Sensor™ | AHS
  • 8. WaferSense SDK
1. Multi-Sensors | AMS, AMSR, AVLS3

Manuals & Guides

CyberOptics WaferSense and ReticleSense Multi-Sensor devices include the Auto Multi Sensor™ (AMS, AMSR) and Auto Vibration and Leveling Sensor™ (AVLS3)

2. Particle Sensors | APS, APS2, APS3, APSR, APSRQ, IPS

Manuals & Guides

CyberOptics WaferSense and ReticleSense Particle Sensor devices include the Airborne Particle Sensor™ (APS, APS2, APS3, APSR, APSRQ) and In-Line Particle Sensor™ (IPS)

3. Auto Gapping System™ | AGS

Manuals & Guides

4. Auto Leveling System™ | ALS, ALS2, & ALS2V

Manuals & Guides

5. Auto Teaching System™ | ATS

Manuals & Guides

6. Auto Vibration System™ | AVS

Manuals & Guides

7. Auto Humidity Sensor™ | AHS

Manuals & Guides

8. WaferSense SDK

Complete Installation

  • 1. Auto Gapping System | AGS
  • 2. Auto Leveling System | ALS, ALS2, & ALS2V
  • 3. Auto Multi Sensors | AMS, AMSR, AHS
  • 4. Airborne Particle Sensors | APS2, APS3, APSR & APSRQ
  • 5. Auto Teaching System | ATS
  • 6. Auto Vibration System | AVS
  • 7. Auto Vibration and Leveling Sensor | AVLS3
5. Auto Teaching System | ATS

Complete ATS Installation with Drivers

6. Auto Vibration System | AVS
7. Auto Vibration and Leveling Sensor | AVLS3

Manuals & Guides