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Downloads and Manuals

For all of your product information needs for WaferSense® and ReticleSense® wireless measurement devices and the In-Line Particle Sensor™, including downloadable software, manuals and guides.

Looking for Wafer Mapping Sensor information? These documents have been moved to the Wafer Mapping Sensor Product pages.

Wafer Mapping Sensors
  • CyberOptics takes pride in providing responsive and expert technical support. Experienced and knowledgeable technical support/application engineers are just a click or phone call away.
  • CSsupport@cyberoptics.com
  • Phone: +1 (800) 366-9131 or +1 (763) 542-5000.
  • WaferSense® & ReticleSense® (CyberSpectrum™)
  • WaferSense® & ReticleSense® (Legacy)
  • 1. Multi-Sensors | AMS, AMSR, AVLS3
  • 2. Particle Sensors | APS, APS2, APS3, APSR, APSRQ, IPS
  • 3. Auto Gapping System™ | AGS
  • 4. Auto Leveling System™ | ALS, ALS2, & ALS2V
  • 5. Auto Teaching System™ | ATS
  • 6. Auto Vibration System™ | AVS
  • 7. Auto Humidity Sensor™ | AHS
  • 8. WaferSense SDK
1. Multi-Sensors | AMS, AMSR, AVLS3

Manuals & Guides

CyberOptics WaferSense and ReticleSense Multi-Sensor devices include the Auto Multi Sensor™ (AMS, AMSR) and Auto Vibration and Leveling Sensor™ (AVLS3)

2. Particle Sensors | APS, APS2, APS3, APSR, APSRQ, IPS

Manuals & Guides

CyberOptics WaferSense and ReticleSense Particle Sensor devices include the Airborne Particle Sensor™ (APS, APS2, APS3, APSR, APSRQ) and In-Line Particle Sensor™ (IPS)

3. Auto Gapping System™ | AGS

Manuals & Guides

4. Auto Leveling System™ | ALS, ALS2, & ALS2V

Manuals & Guides

5. Auto Teaching System™ | ATS

Manuals & Guides

6. Auto Vibration System™ | AVS

Manuals & Guides

7. Auto Humidity Sensor™ | AHS

Manuals & Guides

8. WaferSense SDK

Complete Installation

  • 1. Auto Gapping System | AGS
  • 2. Auto Leveling System | ALS, ALS2, & ALS2V
  • 3. Auto Multi Sensors | AMS, AMSR, AHS
  • 4. Airborne Particle Sensors | APS2, APS3, APSR & APSRQ
  • 5. Auto Teaching System | ATS
  • 6. Auto Vibration System | AVS
  • 7. Auto Vibration and Leveling Sensor | AVLS3
1. Auto Gapping System | AGS

Manuals & Guides

WaferSense AGS User’s Guide

Complete AGS Installation with Drivers

(4.90 MB) Updated CD with latest drivers and User’s Guide (March 2012) Ver:1.70.001 (AGS 1.7.0 Release)

2. Auto Leveling System | ALS, ALS2, & ALS2V

Manuals & Guides

Complete ALS Installation with Drivers

(6.29 MB) Web Installer with latest drivers and User’s Guide (Aug 2012)

Release Notes

ALS1.1 Release Notes (Feb 2006)

3. Auto Multi Sensors | AMS, AMSR, AHS

Manuals & Guides

Complete AMS Installation with Drivers

4. Airborne Particle Sensors | APS2, APS3, APSR & APSRQ

Manuals & Guides

Complete APS Installation with Drivers

(14.6 MB) Web installer with latest drivers and User’s Guide (November 2017) Version 1.08.002

Complete APS3 Installation with Drivers

(39.8 MB) Web installer with latest drivers and User’s Guide (March 2018) Version 1.0.6.0

5. Auto Teaching System | ATS

Manuals & Guides

WaferSense ATS User’s Guide

Complete ATS Installation with Drivers

6. Auto Vibration System | AVS

Manuals & Guides

WaferSense AVS User’s Guide

Complete AVS Installation with Drivers

(7.3 MB) Web installer with drivers and User’s Guide (Nov 2012) Ver:2.06.001

7. Auto Vibration and Leveling Sensor | AVLS3

Manuals & Guides