CyberOptics Demonstrates Humidity Measurement Sensor for Critical Semiconductor Processes

Auto Multi Sensor improves fab yields by wirelessly measuring humidity, leveling and vibration in real-time

CyberOptics® Corporation demonstrated its ReticleSense® Auto Multi Sensors (AMSR) – the world’s most efficient and effective wireless measurement devices for semiconductor fabs and equipment OEMs at SPIE at the San Jose Convention Center, Feb. 26 – March 3, in booth #326.

At SPIE, CyberOptics showcased its AMSR that measure leveling, vibration, and relative humidity (RH) in an all-in-one wireless real-time device. The AMSR can quickly capture multiple measurements in all locations of the reticle environment, saving equipment engineers or process engineer’s time and expense.

The CyberOptics’ booth also featured the ReticleSense Airborne Particle Sensors (APSR, APSRQ) that speeds equipment set-up and long-term yields in semiconductor fabs by wirelessly monitoring airborne particles in real-time. In addition to small particles, the new large particle detecting and measurement functionality covers a range of sizes with four bins for particles larger than 2, 5, 10 and 30 microns.